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Ushbu ishda termodiffuziya usuli bilan mis kiritilgan yakka kristall n–Si namunalarining strukturaviy holati rentgen-difraksion usul yordamida (111) va (333) refleksiyalar profillari asosida tahlil qilindi. Tadqiqot natijalari legirlangan namunalarda difraksion maksimumlar shakli, intensivligi va ajralish xususiyatlarida sezilarli o‘zgarishlar yuzaga kelishini ko‘rsatdi. (111) refleksiyaning profilida kengayish, assimetriya va qisman ajralish belgilari kuzatildi, bu esa kristall panjarada lokal elastik kuchlanishlar hamda mikrodeformatsiyalar mavjudligini ko‘rsatadi. (333) refleksiya sohasida esa pikning yanada aniq ajralishi va qo‘shimcha komponentning namoyon bo‘lishi yuqori tartibli refleksiyalarning strukturaviy buzilishlarga sezgirligini tasdiqlaydi. Olingan natijalar mis diffuziyasi natijasida kristall panjarada bir jinsli bo‘lmagan deformatsion holat shakllanishi mumkinligini va bunday o‘zgarishlar, ayniqsa, sirtga yaqin qatlamlarda kuchliroq namoyon bo‘lishini ko‘rsatadi. Mazkur tahlil mis bilan legirlangan kremniyda diffuziya bilan bog‘liq strukturaviy o‘zgarishlarni baholashda (111) va (333) refleksiyalarning muhim diagnostik ahamiyatga ega ekanini ko‘rsatadi.
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